@lewm I found a website called "Audio Check". It has lots of test waveform files. including IMD test waveforms. The one I used is 60Hz/7KHz with a 4:1 ratio 60/7000. This is the SMPTE spec. I downloaded this file and burned a CD. I played that CD on my Oppo 105 through to the preamp out.. This method bypasses the entire phono chain, but keeps the preamp. The conclusion is that there is no contribution to IMD from the digital path to the preamp (included). The IMD test on the phono section involves measuring at the preamp outputs. Since the preamp was tested OK on the previous test with the CD, the source(s) for the IMD have to be in the phono path. This path comprises the cartridge, tonearm, turntable, SUT (if used), and the phono preamp. The source is one or more of these. Or it could be some combination of components.
Atmasphere has suggested an interesting effect may be causing ecxcess IMD. I have no experience with what he's saying, although I do inderstand the physics. I am thinking about how to measure this. I hope Atmasphere replies with some useful suggestions.
My original post stated that the IMD was different for each cartridge. Hana ML was 0.5%. The Shelter 901 was 3%.
Subsequently, I have discovered that adjusting VTA changes the amount of IMD and there is an optimum, but it is like 2.5% for the Shelter, not much of a change. I'm struggling to find what a "normal" amount of IMD is. Maybe these numbers are typical and I shouldn't worry.