@fleschler- You have it backwards. A higher frequency US will have lower energy release and it will be much more evenly distributed than lower frequency. The cavitation bubble size is inversely proportional to the frequency; the higher the frequency, the smaller the bubbles and the lower the energy release when they collapse. The smaller bubbles are also more effective at removing smaller particles than larger bubbles (lower frequency), especially between the grooves. The Kirmuss RCM is closer to an industrial cleaner and should be avoided IMHO.
Higher temps facilitate cavitation and will increase the energy release, which may not be desirable if you are worried about damage. Adding surfactants and IPA will also increase cavitation. Whether this is advantageous or not depends on frequency, power, chemistry of the bath, distance from the transducers, volume of the tank, coupling efficiency of the transducers and matching of the drive signal for both impedance and frequency of the transducers.
Higher temps facilitate cavitation and will increase the energy release, which may not be desirable if you are worried about damage. Adding surfactants and IPA will also increase cavitation. Whether this is advantageous or not depends on frequency, power, chemistry of the bath, distance from the transducers, volume of the tank, coupling efficiency of the transducers and matching of the drive signal for both impedance and frequency of the transducers.